Results of measurements of the response of a delta-doped CCD to neutral and charged particle beams

We report the measurements of the response of a delta-doped Charge Coupled Device (CCD) in imaging mode to beams of charged and neutral particles. That is, the detector imaged the incident beam over its 1024 × 1024 pixels, integrating the number of particles counted in each pixel during the exposure period. In order to count individual particles the exposure time would have had to be reduced considerably compared to the typical ?5 s used in these studies. Our CCD thus operated in a different manner than do conventional particle detectors such as the CEM and MCP that normally are used in a particle counting mode. The measurements were carried out over an energy range from 0.8 to 30 keV. The species investigated include H, H⁺, He⁺, N⁺, N₂⁺, and Ar⁺. The energy and ion mass covered wider ranges than previous measurements for the CCD. The results of these measurements show, as in the case of the previous measurement, for a given ion the CCD response increases with energy and for a given particle energy the response decreases with increasing mass of the particle. These results are in agreement with predictions of the theory of the range of ions in solids. The results also show the possibility for the application of the delta doped CCD as a detector for low energy particle measurements for space plasma physics applications.