真空紫外探测器关键参数校准装置

当前真空紫外空间探测技术迅猛发展，真空紫外载荷应用越来越广，其中的核心器件真空紫外探测器的特性校准变得越来越重要，针对国内真空紫外探测器关键参数校准能力缺失问题，研制了一套真空紫外探测器关键参数校准装置，实现光谱响应率、线性度等参数的校准。论述了真空紫外探测器光谱响应率、线性度参数的校准方法，介绍了校准装置的硬件组成、校准方法和软件功能，并对其进行了测量不确定度评定。测试结果证明表明，该校准装置可以对真空紫外探测器进行主要参数的校准，校准结果准确、有效。

Calibration Device for Key Parameters of VUV Detector

At present,with the rapid development of VUV space detection technology,VUV load is applied more and more widely,and the characteristic calibration of the VUV detector,the core component of which is becoming more and more important.Aiming at the lack of the ability of key parameters calibration of domestic VUV detector,a calibration device of key parameters for VUV detector was developed to realize the calibration of spectral response rate,linearity and other parameters.The calibration method of spectral response rate and linearity of VUV detector was described.The hardware composition,calibration method and software function of the calibration device were introduced,and the measurement uncertainty was evaluated.The test results show that the calibration device can calibrate the main parameters of the VUV detector,and the calibration results are accurate and effective.