| 基于量子化、芯片化的先进计量测试技术发展动态 |
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| 引用本文： | 杜晓爽,胡毅飞,冯英强,杨军,何巍,费丰,刘原栋,蔡静,林敏,吴爱华,郝新友,谌贝,刘杰.基于量子化、芯片化的先进计量测试技术发展动态[J].宇航计测技术,2020,40(5):11-21. |
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| 作者姓名： | 杜晓爽 胡毅飞 冯英强 杨军 何巍 费丰 刘原栋 蔡静 林敏 吴爱华 郝新友 谌贝 刘杰 |
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| 作者单位： | 1.北京无线电计量测试研究所；2.计量与校准技术重点实验室；3.中国电子科技集团公司第四十一研究所；4.中国兵器工业集团第五三研究所；5.中国航空工业集团公司北京长城计量测试技术研究所；6.中国原子能科学研究院；7.中国电子科技集团公司第十三研究所；8.国防科技工业颗粒度一级计量站。 |
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| 摘 要： | 计量是国家质量基础的重要组成部分，产品质量的提升离不开科学、精准的计量。工业发达国家极为重视计量测试技术的发展。通过搜集、整理量子效应计量、芯片级计量等国内外大量文献资料，归纳分析了近年来国外先进计量测试技术发展动态与趋势。以量子技术和基本物理常数为基础建立量子计量基标准，将大幅提高测量准确度和稳定性，结合量子效应的微加工技术实现芯片尺度的测量等，微纳尺度计量技术也在科学研究、精密测量、智能制造等领域得到广泛应用。本文可为我国计量技术发展提供借鉴。
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| 关 键 词： | 量子效应 片上计量 太赫兹计量 纳米尺度 飞秒激光 先进材料分析 计量 校准 国际单位制 |
Development Trend of Metrology and Measurement based on Quantum Effect and Chip |
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| DU Xiao-shuang,FENG Ying-qiang,HU Yi-fei,YANG Jun,HE Wei,FEI Feng,LIU Yuan-dong,CAI Jing,LIN Min,WU Ai-hua,HAO Xin-you,CHEN Bei,LIU Jie.Development Trend of Metrology and Measurement based on Quantum Effect and Chip[J].Journal of Astronautic Metrology and Measurement,2020,40(5):11-21. |
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| Authors: | DU Xiao-shuang FENG Ying-qiang HU Yi-fei YANG Jun HE Wei FEI Feng LIU Yuan-dong CAI Jing LIN Min WU Ai-hua HAO Xin-you CHEN Bei LIU Jie |
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| Institution: | 1.Beijing Institute of Radio Metrology and Measurement;2.Science and Technology on Metrology and Calibration Laboratory;3.The 41st Research Institute of CETC;4.CNGC Institute 53; 5.Changcheng institute of metrology & measurement;6.China Institute of Atomic Energy;7.The 13th Research Institute of China Electronics Technology Group Corporation;8.National Defence Science Technology Industry Particle Size First-order Metrology Station. |
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| Abstract: | Metrology is one key part of national quality foundation,its technical level directly reflects the status of the scientific and technical development.Industrial developed countries attach great importance to development of metrology and measurement.By collecting and sorting lots of documents on the quantum metrology,on-chip measurement,etc.more new standards was established,which great improved measurement accuracy and stability based on quantum effect.Micromachining technology implement on-chip measurement based on quantum effect.Otherwise nanoscale metrology is widely used in scientific research,precision measurement,intelligent manufacturing,et al.A summary of the development trend of foreign advanced metrology and measurement technology is given and a close analysis is made in this paper,providing a useful reference for the development of national metrology and measurement. |
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| Keywords: | Quantum effect On-chip measurement Terahertz measurement Nanoscale Femtosecond laser Advanced materials analysis Metrology Calibration International system of units |
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