| 超精密球度的激光干涉测量方法 |
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| 引用本文： | 朱正辉,缪寅宵.超精密球度的激光干涉测量方法[J].宇航计测技术,1999,19(2):8-10. |
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| 作者姓名： | 朱正辉 缪寅宵 |
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| 作者单位： | 中国航天工业总公司第一计量测试研究所 |
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| 摘 要： | 传统的球度测量方法很难达到亚微米级的测量准确度。为此，提出了超精密球度激光干涉测量的新方法，介绍了测量装置的结构及测量原理，并给出了球面波和球度计算的数学模型。
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| 关 键 词： | 球度测量 激光干涉 拼接 数学模型 |
Laser interference method for measuring super high precision sphericity |
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| Zhu Zhenghui\ Miao Yinxiao.Laser interference method for measuring super high precision sphericity[J].Journal of Astronautic Metrology and Measurement,1999,19(2):8-10. |
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| Authors: | Zhu Zhenghui\ Miao Yinxiao |
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| Institution: | Zhu Zhenghui\ Miao Yinxiao |
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| Abstract: | It is difficult for traditional measuring methods to attain the level of submicron error. The new laser interference method for measuring super high precision sphericity is presnted. Introduces the principle and the arrangement of this apparatus. Mathematical model for calculating sphericity is given. |
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| Keywords: | Sphericity measurement Laser interferece Connection Mathematical model |
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