三维表面微观形貌的表征参数和方法

近几年，由于计算能力、速度和图像、数据处理技术的不断提高，极大地推进了３Ｄ表面微观形貌测量仪的实用化和商品化，同时也增加了研究者对３Ｄ分析的兴趣。总结了近期文献中出现的３Ｄ分析方法和表征参数，如：基准表面、图形（ 像） 表征、参数表征以及Ｍｏｔｉｆ 和分形表征方法，旨在促进我国对３Ｄ表面研究的发展。最后提出了３Ｄ表征技术的任务和发展方向。

The parameters and methods of characterizing 3 D surface microtopography

In recent years, the vast growth in modern computing power and velocity, image analysis and numerical processing capabilities, makes the measuring instruments of 3 D surface topography more practicable and commercialize, also raises a great interest of researchers for 3 D analysis. The state of art in 3 D analysis and characterization is reviewed, such as reference surface, visualization techniques, definition and use of parameters, motifs and fractal presention etc. The aim to do this is to speed the development of 3 D surface studies. Finally, comments on standardization and further studying the functional meaning of 3 D parameters are given.