微米尺度格栅标准样片的质量参数评价;；

论述了以CD-SEM作为核心仪器评价微米尺度格栅标准样片质量参数的方法。以某标称线距尺寸为3μm的不同材料、不同格栅高度的标准样片为例进行了各项质量参数的测量，并对实验数据进行相关因素的比对分析。通过分析，为制作优质的微米格栅标准样片提供了一定的理论参考。分析结果表明本文所述方法适用于微米尺度格栅标准样片的质量参数评价。

Estimation on Quality Parameter of Micron-level Grids Pattern Standard Sample

The paper discussed the method of evaluating the quality parameters of micron-level grids pattern standard samples using CD-SEM as the core equipment.It gave an example to measure the quality parameters in different material and different height with nominal pitches of 3μm,and comparative analyzed the relative factors of the experimental data.Combined with the analysis,it provided a theoretical reference for producing high-quality micron-level grids pattern standard sample.The analysis results show that the method described in this paper is suitable for evaluating the quality parameters of micron-level grids pattern standard samples.