三维表面微观形貌的测量方法

分析了表面结构的形成过程及其分类 ,介绍了目前在 3D微观形貌测量过程中广泛使用的触针法、扫描探针显微镜和几种光学方法的基本原理、测量范围、分辨力等特性。最后指出了 3D分析技术的现状和将来的发展趋势。

The measurement techniques of 3D surface microtopography

Analyses the forming and classification of 3D surface topography firstly, and considers the characteristic functionality of 3D surface morphology measurements of different classical and modern metrological systems. The systems considered here are those at present most commonly used techniques: classical stylus, scanning probe microscopy, confocal and interferometric microscopy. The vertical and horizontal measuring range and resolution of above instruments are illustrated, which can help us to select the suitable techniques for a given measurement. Lastly, the future tendency of 3D surface measurement and characterization techniques are point out.