基于光外差的光电探测器绝对频响测试技术研究

本文介绍了一种基于光外差的光电探测器绝对频响测试方法，通过对绝对频响的数学理论推导，得出光电探测器频响参数的计算公式；设计并研制了一套光外差测试系统，实现波长在1 550nm对响应带宽高达67GHz的光电探测器频响测试；通过与高精度光波元件分析仪比对测试，验证了系统的准确性和可靠性，系统最大偏差不大于0.8dB，测量重复性优于1%。该研究可有效解决国内对(40～67)GHz光电探测器频响参数，特别是绝对频响的测试，对国内开展67GHz光电探测器频响校准能力建设工作具有重要意义。

Research on Absolute Frequency Response Measurement Technology of Photodetector based on Optical Heterodyne

This paper introduces a method of measuring the absolute frequency response of photodetectors based on optical heterodyne.Through the mathematical derivation of absolute frequency response,the calculation formula of frequency response parameters of photodetector is obtained.And an optical heterodyne measurement system was designed to measure the frequency response of photodetector with high-response bandwidth of 67GHz at 1550nm.The accuracy and reliability of the system are verified by comparison with the high-precision optical wave component analyzer.The maximum deviation of the system is less than 0.8dB,and the measurement repeatability is better than 1%.This study can effectively solve the domestic test of frequency response parameters of (40～67)GHz photodetectors,especially the absolute frequency response,and is of great significance for the construction of frequency response calibration capacity of 67GHz photodetectors in China.