大行程解耦三平动微定位平台的设计与优化

为设计具有大行程与良好解耦特性的三平动微定位平台，提出了一种新型2T3R型运动副。基于2T3R型运动副，设计了三平动微定位平台的结构；采用非线性模型法建立了平台力-位移关系与丢失运动的理论模型，并采用拉格朗日方程建立了平台固有频率的理论模型；采用目标规划法对三平动微定位平台进行了参数优化；通过有限元仿真验证了理论模型的正确性。理论计算与仿真研究结果表明:平台一阶固有频率为51.27 Hz，在1 mm运动行程内，x、z轴方向的丢失运动分别小于0.67%、0.20%，输入与输出完全解耦。研究结果证明了运动副、平台结构设计的有效性及优化模型的可行性。 

Design and optimization of large-stroke decoupled three-translational micro-positioning platform

To design large-stroke three-translational micro-positioning platforms with excellent decoupling characteristics, a new 2T3R type motion pair was proposed. The structure of three-translational micro-positioning platform was designed based on the 2T3R type motion pair. The theoretical models of force-displacement relationship and lost motion were established by nonlinear model method, the theoretical models of platform natural frequency were established by Lagrange equation. The goal programming method was used to optimize parameters of the micro-positioning platform. The correctness of the above theoretical model was verified by finite element simulation. According to the theoretical calculation and simulation results, the first-order natural frequency of the platform is 51.27 Hz. the lost motions in x and z directions are less than 0.67% and 0.20% in 1 mm motion stroke, and the input and output motions are completely decoupled. Results show that the structure design of motion pair and platform is effective, and the optimization model is feasible.