| 射频辉光放电法沉积类金刚石碳膜 |
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| 引用本文： | 岳锡华,孙健.射频辉光放电法沉积类金刚石碳膜[J].北京航空航天大学学报,1991(2):1-7. |
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| 作者姓名： | 岳锡华 孙健 |
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| 作者单位： | 北京航空航天大学材料科学与工程系
(岳锡华，孙健)，北京航空航天大学材料科学与工程系(康向阳) |
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| 摘 要： | 研究了碳氢气体通过射频辉光放电沉积类金刚石碳膜。研究了射频电压和沉积时间对膜厚和维氏显微硬度的影响。此外,还进行了微动磨损试验。本实验所用的碳氢气体为C_2H_2,基体材料为TC4钛合金(Ti-6％Al-4％V)和45钢(Fe-0.45％C)。
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| 关 键 词： | 射频辉光放电 类金刚石碳膜 磨损 |
DEPOSITION OF DIAMOND-LIKE CARBON FILMS BY THE RADIO FREQUENCY GLOW DISCHARGE METHOD |
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| Yue Xihua Sun Jian Kang Xiangyang.DEPOSITION OF DIAMOND-LIKE CARBON FILMS BY THE RADIO FREQUENCY GLOW DISCHARGE METHOD[J].Journal of Beijing University of Aeronautics and Astronautics,1991(2):1-7. |
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| Authors: | Yue Xihua Sun Jian Kang Xiangyang |
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| Institution: | Dept. of Mater. Sci. and Eng. |
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| Abstract: | The deposition of diamond-like carbon films produced by radio frequency glow discharge of hydrocarbon gas was studied,and the effects of radio frequency voltage and deposition time on the thickness and the Vickers microhardness of films were investigated. In addition, the fretting test was performed. In this experiment, the hydrocarbon gas used was C2H2, and the substrates used were both titanium alloy TC4(Ti-6%Al-4%V)and carbon steel 45(Fe-0. 45%C). |
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| Keywords: | radio frequency glow discharge diamond-like carbon films Vickers microhardness fretting |
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