MEMS陀螺半实物仿真系统设计

微机电(Micro-Electro-Mechanical Systems, MEMS)陀螺是基于科氏力原理，用于检测外部旋转的一种角速度传感器。由于MEMS陀螺本身性能的限制，其内部机理研究和接口电路设计的进程发展缓慢。本文通过分析MEMS陀螺的数学模型，并通过将RLC电路与MEMS陀螺特征方程形式进行对比，说明了借助RLC电路建立MEMS陀螺半实物仿真 (Hardware-in-loop Simulation，HILS) 系统模型的可行性。在充分考虑了实际MEMS陀螺的输入/输出项、耦合项和谐振频率调节等完整功能的前提下，完成了MEMS陀螺的HILS系统模型各个功能模块的设计。本文设计的MEMS陀螺的HILS系统模型可实现实际MEMS陀螺的输入输出、谐振频率调节以及角速度检测，并通过一系列实验证实了其性能的可靠性，本设计为将HILS方法应用于MEMS陀螺研究提供了有效的依据。

Hardware-in-Loop Simulation Model of MEMS Gyroscope

Micro-Electro-Mechanical Systems (MEMS) gyroscope is an angular rate sensor based on the principle of Coriolis force and used to detect external rotation. Due to the limitation of the performance of the MEMS gyro itself, the progress of its internal mechanism research and interface circuit design is slow. In this paper, the mathematical model of the MEMS gyroscope is analyzed, and the similarity of the characteristic equations of the RLC circuit and the MEMS gyroscope is compared. The feasibility of establishing a MEMS gyroscope hardware-in-loop simulation (HILS) system model with the aid of RLC circuits is demonstrated. Full consideration is given to the complete functions of the actual MEMS gyroscope''s input/output items, coupling items, tuning functions, and so on. The design of each functional module of the HILS system model of the MEMS gyroscope is completed. The reliability of its performance has also been confirmed by a series of experiments. This paper provides an effective basis for applying the HILS method to the research of MEMS gyroscopes.