半球谐振陀螺调平技术发展综述

半球谐振陀螺是一种新型的固态波动陀螺，具有精度高、体积小、寿命长、功耗低等优点。谐振子的品质因数高低和不平衡质量大小直接决定了半球谐振陀螺的性能，因此，不平衡质量的辨识和调平是提高谐振陀螺性能的关键。首先，介绍了六种不同的刚性轴方位和不平衡质量辨识方法和系统，分析对比了每种方法的优缺点；其次，对谐振子的调平理论进行了归纳，进而对机械调平、化学调平、激光调平和离子束调平的研究现状和特点进行了梳理和归纳；最后对半球谐振陀螺调平技术的发展作了简要评述。

Survey of Balancing Technology for Hemispherical Resonator Gyroscopes

The hemispherical resonator is a new kind of solid state gyroscope. It has advantages of high precision, small size, long life, low power consumption. The performance of hemispherical resonator gyroscope is determined by the quality factor and the frequency split of the resonator. Therefore, the identification and trimming of the unbalanced mass is quite important. Firstly, six different methods and systems for the identification of the rigid axis location and the unbalanced mass are introduced. The advantages and weaknesses of the six methods are analyzed. Secondly, the balancing theories are summarized. The status and the characteristic of mechanical balancing, chemical balancing, laser balancing and ion beam balancing are reviewed. Finally, some comments are made on the balancing technology of the hemispherical resonator.