动态比较法校准正压漏孔的漏率

介绍了校准正压漏孔漏率的动态比较法，可以校准的正压漏孔漏率范围为１×１０－４～１×１０－７Ｐａｍ３／ｓ。参考漏孔动态比较法是用一只漏率已知的正压漏孔作参考标准，分别让示漏气体通过参考正压漏孔或被校正压漏孔后，在内充大气的累积容器中累积不同的时间，产生大致相同的示漏气体增量；静态膨胀后，测量它们在动态流量法系统中产生的动态平衡分压力，再进行线性近似比较计算出被校正压漏孔的漏率。定量气体动态比较法是采用定量的示漏气体作参考标准，替代参考漏孔动态比较法中示漏气体通过参考正压漏孔后在累积容器中的累积量。

DYNAMIC COMPARISON METHODS FOR CALIBRATING LEAK RATE OF PRESSURE LEAKS

In the paper,two dynamic comparison methods were introduced.The me thods can be used to calibrate the leak rate from 1×10 -4 to 1×10 -7 Pa·m 3/s with the lower pressure of leak being atmospheric pressure.In dynamic comparison method with reference leak,firstly,test gas through unknown leak or reference leak was accumulated for different times to increase about the same quantity in a vessel which was filled with atmosphere.Secondly the mixed gas was expanded.Thirdly the expanded gas was introduced to a dynamic flow system and the dynamic balance partial pressure of test gas was measured and compared.In dynamic comparison method with quantitative gas,the quantitative gas takes the place of the accumulated test gas through reference leak.