柱形等离子体电离阻抗测量与分析

表面波等离子体的研究由于实验数据的大量积累而得到快速发展.结合传输线阻抗匹配原理,设计实验对柱形表面波等离子体电离阻抗进行测量;参照金属辐射体中辐射阻抗与损耗阻抗的求解方法,在简化条件下理论计算柱形等离子体的电离阻抗,并与实验数据进行分析比对.研究表明,表面波激发柱形等离子体的电离阻抗对等离子体源产生效率的分析及等离子体参数的诊断有着重要作用.这种新型等离子体源的研究具有非常重要的意义.

Measurements and Analysis of Plasma Column Discharge Impedance

Recently a large number of surface-wave plasmas experimental data have been accumu- lated,so their modeling is well advanced and they have found applications in various fields of research and technology.An experiment to measure surface-wave plasma column discharge impedance has been designed,using the principle of impedance matching in transmission line.Refer to the method to work out the radiation impedance and loss impedance of metal antenna,plasma column discharge impedance is calculated in the simplest cases and compared with experimental results.It is shown that surface-wave plasma column discharge impedance plays an important part in analyzing the ef- ficiency of plasma source and diagnosing plasma parameters such as densities,temperatures.This study will be of great importance for further scientific and engineering work in order to meet the demands of the various diverse plasma technological applications.