防原子氧与抗辐射环境薄膜性能研究

金属氧化物薄膜具有良好的光学，电学特性，因此是卫星表面热控材料防静电积累的重要材料之一。实验研究发现这些金属氧化物薄膜还是具有优良的防原子氧和抗空间辐照环境的能力，而且这种能力与成膜方法及工艺过程直接相关。经模拟原子氧环境的氧等离子体作用后，溅射镀氧化锡样品的质损明显小于蒸镀氧化铟锡薄膜的质损，而氧化铟锡薄膜的质损又小于未镀薄膜试样质损。

PERFORMANCE STUDY OF THIN FILMS FOR ATOMIC OXYGEN AND RADIATION ENVIRONMENT PROTECTION IN SPACE

The metal oxide films are widely use as thermal control materials on satellitesurface against static electricity accumulation. It is further found in the experimentthat these films have also the excellent ability for plasma oxygen and radiationprotection in the space environment. The ability depends on the deposition methodsand process parameters. The test results indicate that the mass loss of the sampleswith sputtered TO film is much less than that of the samples of evaporated ITOfilm, and the mass loss of the samples with evaporated ITO film is less than thatof the samples uncoated too. After plasma oxygen action, electron radiation andultraviolet radiation, the variation of the sheet resistance and the solar absorptanceof To film is also much less than that of ITO film. The AFM analysis proves thatthere is a large difference of the film's stability and compactness by the differentpreparing method and processes.