红外探测器晶片电极设计与应力分析

红外探测器是卫星姿态控制中不可或缺的一种探测器.总结了国外近年来红外热敏探测器晶片电极的研究进展，重点介绍了热敏电阻晶片电极的设计思路及其制备工艺.分析了薄膜金属电极给热敏电阻晶片组件带来的各类应力.提出在热敏电阻晶片电极设计时，应选择合适的电极结构、电极材料、膜层厚度、金属薄膜的制备工艺、热处理制度等工艺参数，并确保热敏电阻晶片焊点的应力较低，才能保证红外探测器的性能及其可靠性.实验结果表明，采用Ti/Au双层结构电极的热敏电阻可达到理想的噪声系数和良好的界面结合力.

Design and Stress Analysis of Thermistor Chip Electrode

The infrared detector is a kind of indispensable detectors in satellite attitude control systems. The international research progress of thermistor wafer electrode is summarized, especially its design and preparation process. The internal stress caused by various thin film metal electrodes is also analyzed. It is found that, in order to get a low stress solder joint and high reliability infrared detector, the process parameters such as electrode structure, materials, the thickness of the film, preparation method and heat treatment should be considered. A Ti/Au double-layer structure electrode is employed to the thermistor wafer to achieve an ideal noise coefficient and a good bonding strength of the joint.