超精车削中圆度误差的随机补偿

 在超精车削中用补偿主轴误差来提高工件圆度,在国产超精密车床S1-235上使用金刚石车刀进行的镜面切削实验。结果表明,用随机补偿的方法可使工件圆度改善60％以上,表面粗糙度不受影响,其圆度值小于0.05μm。

STOCHASTIC COMPENSATION FOR ROUNDNESS IN ULTRA PRECISION TURNING

In this paper, a method for improvement of the roundness by making compensation for the spindle rotation error motion（SREM） is presented.The compensatory system based on the characteristics of SREM is composed of capacitance sensors, A/D D/A converter, IBM-PC/XT computer and piezo -electric actuator. Time series analysis theory and simulation of SREM show that stochastic compensation can improve the roundness up to 85%. The transfer function of the over ail System is derived, and method of optimal parameter selection is developed.Experimental results show that the roundness error of workpiece can be reduced to less than 0.05μm. A improvement of more than 60% while the surface roughness of workpiece（ 12） is not affected.