角振动校准装置研究

为提升对惯性器件的动态性能评价能力,通过对被校传感器施加标准正弦角振动激励,精确测量角振动过程,实现了对角振动传感器的校准。基于不同频段的特点,将校准频段划分为低频和高频2部分,并提出空气轴承与无刷直流力矩电机相结合的低频角振动台方案,以及轻质空心杯精密空气轴承与框式电磁驱动结构相结合的高频角振动台方案;分别采用精密角度编码器和衍射光栅激光干涉仪实现对低频和高频角振动的测量,成功研制出频率范围为0.25~550Hz、角加速度范围为0.1~1 760rad/s2以及角速度波形失真小于2%的角振动绝对法校准装置。与德国国家物理技术研究院的角振动校准装置相比,该装置能够显著提升承载能力,可广泛用于惯性器件动态性能的测试与评价。

Research on angular vibration calibration devices

In order to improve the evaluating capabilities of dynamic properties for inertial sensors, by loading standard sine wave angular vibration and measuring precisely the angular vibration process, the angular vibration sensor is calibrated. Based on the different frequency specialties, the calibration device is divided to high-frequency and low-frequency two parts. In low-frequency calibration device, an air bearing and brushless direct current torque motor is used. In high-frequency calibration device, a precise air bearing of light hollow cuptype and electromagnetic ariving structure of frame type is designed. Using precise angular encoder measure low-frequency angular vibration and using diffraction grating heterodyne laser interferometer measure high-frequency angular vibration, respectively. A primary angular vibration calibration device with frequency range of 0.25 Hz to 550 Hz, angular acceleration range of 0.1 rad/s² to 1 760 rad/s² and angular velocity wave-distortion below 2% is successfully developed. Compared with the angular vibration calibration device in the Physikalisch-Technische Bundesanstalt, this equipment could provide more load bearing, and could be widely used in dynamic properties tests and evaluating of inertial sensors.