过滤式阴极电弧沉积类金刚石薄膜的特性分析

 利用自行研制的过滤式阴极电弧沉积装置，在硅片和高速钢基体材料上获得了类金刚石薄膜，分别采用扫描电镜、原子力显微镜、喇曼光谱以及磨损实验等手段对薄膜进行了分析研究。结果表明，所获得的类金刚石薄膜为非晶态，sp3含量最高达70%;基体材料对成膜质量影响较大，在硅片上薄膜的摩擦系数可达0.08;同时偏压的变化会引起喇曼谱线中D峰和G峰位置向低频移动，半高宽σG增大、σD减小。

CHARACTERIZATION OF DIAMOND LIKE CARBON FILM PREPARED BY VACUUM ARC DEPOSITION

Diamond like carbon films are successfully obtained on silicon and high speed steel substrates by using a self developed device of filtered vacuum arc deposition.The films are analyzed with SEM, AFM, Raman spectrum and wear test.The substrate affects greatly the film quality, and a change in the bias voltage applied across the substrate can result in a remarked change in μ D, μ G, σ D, and σ G of the film's Raman spectrum.