| ITO透明导电膜的制备及性能 |
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| 引用本文： | 岳锡华,赵屹,张维佳.ITO透明导电膜的制备及性能[J].航空学报,1996,17(1):55-61. |
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| 作者姓名： | 岳锡华 赵屹 张维佳 |
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| 作者单位： | 北京航空航天大学１０２教研室 |
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| 基金项目： | 航空工业总公司“八五”重点预研资助 |
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| 摘 要： | 研究了用直流反应磁控溅射法在无机玻璃基片上制备ＩＴＯ透明导电膜的工艺；测试了膜的电阻率、对可见光的透射率及对垂直入射微波的反射率和透射率；研究了反应溅射时氧浓度、溅射后退火气氛对电阻率和透光率的影响；ＩＴＯ膜方块电阻对微波反射率和透射率的影响
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| 关 键 词： | ITO半导体 膜 溅射 电阻率 透射率 反射率 |
PREPARATION AND PROPERTIES OF ITO TRANSPARENT CONDUCTING FILMS |
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| Yue Xihua,Zhao Yi,Zhang Weijia.PREPARATION AND PROPERTIES OF ITO TRANSPARENT CONDUCTING FILMS[J].Acta Aeronautica et Astronautica Sinica,1996,17(1):55-61. |
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| Authors: | Yue Xihua Zhao Yi Zhang Weijia |
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| Institution: | Faculty 102, Beijing University of Aeronautics and Astronautics, Beijing, 100083 |
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| Abstract: | A process used to prepare ITO transparent conducting films on inorganic glass substrates by d.c. reactive magnetron sputtering is presented. The resistivity,visible light transmittance,reflectivity and transmittance to perpendicularly incidenting microwaves of the film have been measured.The effects of O 2 concentration during reactive sputtering and annealing atmosphere after sputtering on resistivity and visible light transmittance,and the effect of square resistance on reflectivity and transmittance of microwaves have been studied. |
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| Keywords: | ITO films sputtering electrical resistivity transmissivity reflectance |
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