低温等离子体辅助加工综述

随着航空航天、国防科技、能源等领域的快速发展，具有优良机械性能的高强度合金材料及复合材料得到广泛应用，实现这些材料的高效精密低损伤加工具有重要意义。低温等离子体富含活性粒子，能有效改善材料的可切削性，且较易产生、维持和控制，已被广泛应用于难加工材料的辅助加工过程中。在介绍低温等离子体基本特性及分类的基础上，结合国内外低温等离子体辅助加工技术的研究现状，以表面粗糙度、材料去除率、表面损伤、切削力等参数为评价指标，分别阐述了等离子体熔射成形技术、等离子体加热辅助切削技术、冷等离子体射流辅助抛光技术、冷等离子体射流辅助切削技术等的作用机理及效果，并对其发展趋势进行了展望。

Low-temperature plasma assisted machining: A review

With the rapid development of the fields of aerospace, national defense technology and energy, high-strength alloy materials and composite materials with excellent mechanical properties have been widely used. It is of great significance to achieve high-efficiency, high-precision and low-damage machining of these materials. With a lot of active particles, low-temperature plasma can effectively improve material machinability, and is easier to generate, maintain and control; therefore, it has been widely applied in auxiliary machining of difficult-to-cut materials. The basic characteristics and classification of low-temperature plasma, as well as the state-of-the-art low-temperature plasma assisted machining technology at home and abroad, are introduced. Using the parameters of surface roughness, material removal rate, surface damage, and cutting force as evaluation indicators, the mechanisms and effects of plasma spray forming, plasma enhanced machining, cold plasma jet assisted polishing and cold plasma jet assisted cutting are discussed. The development trends of each technology are also discussed.