微细电解铣削加工模型及实验研究

 对微细电解铣削加工技术进行了深入研究。将分层加工技术应用到微细电解加工过程中,显著改善了加工稳定性;建立了微细电解铣削加工的数学模型;基于电化学刻蚀原理,在线制得直径小至10 μm的圆柱电极;分组实验并验证了加工模型中各参数如：电极直径、加工电压、电解液浓度、铣削层厚度等对微细电解铣削加工精度的影响。通过优化加工参数,成功加工出了深三角结构和四棱台微型腔,形状精度高,加工稳定性好。

Theoretical and Experimental Research on Micro Electrochemical Milling

Micro electrochemical milling is proposed as a new method of micro fabrication. In this article, layer manufacturing technique is applied to the process of electrochemical micromachining to improve machining stability. A mathematical model of micro electrochemical milling by layer is established to ensure high machining accuracy. Because there is no tool wear in electrochemical micromachining, it can be applied easily to the fabrication of micro structures by moving the tool electrode along a programmed path. Micrometer scale cylindrical electrode are fabricated by electrochemical etching. With a tungsten electrode of 10 μm in diameter, sets of experiments are carried out to investigate the influence of some predominant process parameters on machining accuracy, such as the electrode diameter, machining voltage, concentration of electrolyte, cut thickness, etc. After the preliminary experiments, a deep triangular micro structure and a square micro cavity with schnabelia structure are fabricated successfully.