| 材料表面薄膜硬度的测试计算 |
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| 引用本文： | 王林栋,李敏,张泰华,梁乃刚.材料表面薄膜硬度的测试计算[J].中国航空学报,2003,16(1):52-58. |
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| 作者姓名： | 王林栋 李敏 张泰华 梁乃刚 |
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| 作者单位： | State Key Lab. of Nonlinear Mechanics，Institute of Mechanics，Chinese Academy of Sciences，Beijing\ 100080，China |
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| 基金项目： | Chinese Academy of Sciences Foundation (KGCX1-11)，National Natural Science Foundation of China(10 2 3 2 0 5 0 )，Min-
istry of Science and Technology Foundation(2 0 0 2 CB412 70 6) |
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| 摘 要： | 给出了基于纳米硬度试验的表层薄膜的硬度测算方法。首先研究如何利用有限元计算弥补纳米硬度测量在压痕深度小于百纳米时的精度缺陷，进而探讨薄膜一基体材料系统的硬度随压痕深度变化的规律，最后导出了根据实验曲线预测表层薄膜材料的硬度的公式，并进行了实验验证。
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| 关 键 词： | 薄膜材料 硬度 计算 有限元模拟 纳米压痕 |
Hardness Measurement and Evaluation of Thin Film on Material Surface |
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| WANG Lin-dong,LI Min,ZHANG Tai-hua,LIANG Nai-gang.Hardness Measurement and Evaluation of Thin Film on Material Surface[J].Chinese Journal of Aeronautics,2003,16(1):52-58. |
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| Authors: | WANG Lin-dong LI Min ZHANG Tai-hua LIANG Nai-gang |
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| Abstract: | A method for hardness measurement and evaluation of thin films on the material surface was proposed. Firstly, it is studied how to obtain the force indentation response with a finite element method when the indentation is less than 100 nanometers, in which current nanoindentation experiments have not reliable accuracy. The whole hardness indentation curve and fitted equation were obtained. At last, a formula to predict the hardness of the thin film on the material surface was derived and favorably compared with experiments. |
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| Keywords: | thin film material hardness nanoindentation finite element simulation |
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