| 类金刚石薄膜的微/纳米机械和摩擦性能 |
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| 引用本文： | 张泰华,刘东旭,郇勇,杨业敏,王秀兰.类金刚石薄膜的微/纳米机械和摩擦性能[J].中国航空学报,2003,16(1):47-51. |
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| 作者姓名： | 张泰华 刘东旭 郇勇 杨业敏 王秀兰 |
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| 作者单位： | ZHANG Tai hua 1，LIU Dong xu 1，HUAN Yong 1，YANG Ye min 1，WANG Xiu lan 2 (1. LNM，Institute of Mechanics，Chinese Academy of Sciences，Beijing\ 100080，China) (2. Beijing Research Institute of Aerospace Materials & Technology，Beijing\ 100076，China) |
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| 基金项目： | National Natural Science Foundation of China (10 2 42 0 0 1，10 172 0 86)，Chinese Academ y of Sciences (KJCX2 -SW-L2 ) |
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| 摘 要： | 采用真空磁过滤等离子电弧沉积的方法在9Crl8钢上沉积不同厚度的DLC膜。为了检测成膜质量，在较宽的载荷范围内分别使用显微硬度、纳米压痕和划痕技术表征9Crl8钢和DLC／9Crl8的机械和摩擦性能。结果显示，9Crl8和DLC的纳米硬度和弹性模量分别为8GPa、250GPa和60GPa、600GPa，9Crl8、DLC和有机膜的摩擦系数分别为0．35、0．20和0．13。纳米压痕和划痕技术能为DLC／9Crl8提供丰富的近表面弹塑性变形和摩擦、磨损等信息。DLC／9Crl8的机械和摩擦性能的研究可以用来评估膜的承载和抗磨损性能。
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| 关 键 词： | 纳米压痕 划痕技术 摩擦性能 机械性能 DLC膜 类金刚石薄膜 |
Micro/Nanomechanical and Tribological Properties of Thin Diamond-Like Carbon Coatings |
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| ZHANG Tai-hua,LIU Dong-xu,HUAN Yong,YANG Ye-min,WANG Xiu-lan.Micro/Nanomechanical and Tribological Properties of Thin Diamond-Like Carbon Coatings[J].Chinese Journal of Aeronautics,2003,16(1):47-51. |
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| Authors: | ZHANG Tai-hua LIU Dong-xu HUAN Yong YANG Ye-min WANG Xiu-lan |
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| Abstract: | The diamond like carbon (DLC) films with different thicknesses on 9Cr18 bearing steels were prepared using vacuum magnetic filtering arc plasma deposition. Vickers indentation, nanoindentation and nanoscratch tests were used to characterize the DLC films with a wide range of applied loads. Mechanical and tribological behaviors of these submicron films were investigated and interpreted. The hardnesses of 9Cr18 and DLC, determined by nanoindentation, are approximately 8GPa and 60GPa respectively; their elastic moduli are approximately 250GPa and 600GPa respectively. The friction coefficients of 9Cr18, DLC, organic coating, determined by nanoscratch, are approximately 0.35, 0.20 and 0.13 respectively. It is demonstrated that nanoindentation and nanoscratch tests can provide more information about the near surface elastic plastic deformation, friction and wear properties. The correlation of mechanical properties and scratch resistance of DLC films on 9Cr18 steels can provide an assessment for the load carrying capacity and wear resistance. |
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| Keywords: | diamond like carbon microhardness nanoindentation nanoscratch solid lubricating |
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