显微视觉自动聚焦的小波测度研究

离散小波变换(DWT)或连续小波变换(CWT)滤波后自相关运算均可对显微图像中的高频信息进行提取,依据高频能量的大小可以判断图像目标特征的离焦程度.基于上述原理,提出与小波变换相关的两类聚焦测度函数:基于DWT的聚焦函数、基于CWT滤波后自相关运算的聚焦函数.以MEMS器件微对准封装系统中的显微视觉单元作为实验平台,运用实验的方法确定小波基、小波因子以及小波系数的计算形式,得到可用于本显微视觉系统的两个基于小波的聚焦测度:Haar二级小波分解系数平方和函数;尺度因子为2-5的Mexican-Hat小波滤波后自相关平方积分函数.最后利用聚焦分辨率与函数计算时间两个参数对聚焦测度函数进行量化评估.与Brenner函数及平方梯度函数等聚焦效果较好的基于空域聚焦测度相比:DWT函数的聚焦分辨率为8.43,比Brenner函数高14%,其计算时间为0.61 s,比Brenner函数缩短52%;而CWT自相关函数在聚焦分辨率上比平方梯度函数低41%,但计算时间比平方梯度函数缩短36%.表明基于小波域的自动聚焦测度函数具有实用价值.

Research on Wavelet Based Autofocus Evaluation in Micro-vision

This paper presents the construction of two kinds of focusing measure operators defined in wavelet domain. One mechanism is that the Discrete Wavelet Transform (DWT) coefficients in high frequency subbands of in-focused image are higher than those of defocused one. The other mechanism is that the autocorrelation of an in-focused image filtered through Continuous Wavelet Transform (CWT) gives a sharper profile than blurred one does. Wavelet base, scaling factor and form to get the sum of high frequency energy are the key factors in constructing the operator. Two new focus measure operators are defined through the autofocusing experiments on the micro-vision system of the workcell for micro-alignment. The performances of two operators can be quantificationally evaluated through the comparison with two spatial domain operators Brenner Function (BF) and Squared Gradient Function (SGF). The focus resolution of the optimized DWT-based operators is 14% higher than that of BF and its computational cost is 52% approximately lower than BF's. The focus resolution of the optimized CWT-based operators is 41% lower than that of SGF whereas its computational cost is approximately 36% lower than SGF's. It shows that the wavelet based autofocus measure functions can be practically used in micro-vision applications.