| Fabrication of Diamond-like Carbon Films by Ion Assisted Middle Frequency Unbalanced Magnetron Sputtering |
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| 作者姓名： | ZHANG Yi-chen SUN Shao-ni ZHOU Yi MA Sheng-ge BA De-chun |
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| 作者单位： | [1]School of Mechanical Engineering and Automation, Northeastern University, Shenyang 110004, China [2]National R＆D Center for Surface Engineering of China, Shenzhen, 518029, China |
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| 摘 要： | Diamond-like carbon （DLC） films are deposited by the Hall ion source assisted by the mid-frequency unbalanced magnetron sputtering technique. The effects of the substrate voltage bias, the substrate temperature, the Hall discharging current and the argon/nitrogen ratio on the DLC film＇s performance were studied. The experimental results show that the film＇s surface roughness, the hardness and the Young＇s modulus increase firstly and then decrease with the bias voltage incrementally increases. Also when the substrate temperature rises, the surface roughness of the film varies slightly, but its hardness and Young＇s modulus firstly increase followed by a sharp decrease when the temperature surpassing 120 ℃. With the Hall discharging current incrementally rising, the hardness and Young＇s modulus of the film decrease and the surface roughness of the film on 316L stainless steel firstly decreased and then remains constant.
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| 关 键 词： | 宝石样碳膜 离子辅助 中频不均衡磁控管溅射 制造 霍耳离子源 |
| 收稿时间： | 2006-08-10 |
| 修稿时间： | 2006-11-06 |
Fabrication of Diamond-like Carbon Films by Ion Assisted Middle Frequency Unbalanced Magnetron Sputtering |
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| ZHANG Yi-chen SUN Shao-ni ZHOU Yi MA Sheng-ge BA De-chun.Fabrication of Diamond-like Carbon Films by Ion Assisted Middle Frequency Unbalanced Magnetron Sputtering[J].Chinese Journal of Aeronautics,2006,19(B12):119-125. |
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| Abstract: | |
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| Keywords: | fluid machinery and engineering diamond-like carbon films middle frequency unbalanced magnetron sputtering hall ion source |
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