光纤F—P腔压力传感器的研究进展

光纤F—P腔压力传感器因其独有的优点广泛应用于军事、民用领域。国内外诸多高校、科研院所都在对其进行研究。本文介绍了光纤F—P腔压力传感器的研究进展，对全光纤结构F-P压力传感器、激光加工微型光纤压力传感器、二氧化硅膜片压力传感器的结构和制作过程进行了总结，并对利用MEMS制作压力传感器的工艺进行了详述，对比分析了不同加工工艺下传感器的性能及其优缺点。

Research Progress of Optical Fiber Type Fabry-perot Pressure Sensor

The Fabry-perot （F-P） cavity pressure sensor has been widely used in military and civil fields. It is researched by many domes- tic or foreign universities and research institutes. The research progress of the optical fiber type F-P pressure sensor is introduced, and the struc- tures and manufacturing processes of F-P pressure sensor, the laser processing miniature fibre-optical pressure sensor and the full optical fiber structure silicon diaphragm pressure sensor are summarized. The technology of using MEMS to produce pressure sensor is described in detail. The sensor performance and its advantages and disadvantages in different processing technology are compared and analyzed.