| Ф300mm大口径平面等厚干涉仪波面数字化技术改造 |
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| 引用本文： | 王青,高志山,李致新,张永宁,赵东升,胡中,何跃.Ф300mm大口径平面等厚干涉仪波面数字化技术改造[J].航空计测技术,2011(5):12-14. |
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| 作者姓名： | 王青 高志山 李致新 张永宁 赵东升 胡中 何跃 |
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| 作者单位： | [1]南京理工大学电光学院,江苏南京210094 [2]北方夜视科技集团有限公司检验计量部,云南昆明650114 |
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| 摘 要： | 介绍了把Ф300 mm口径平面等厚干涉仪改造为移相式数字平面干涉仪的基本情况。改造后的仪器采用液面基准的系统误差校准方法,在Ф300 mm口径时的最大允许误差为76 nm（PV值）,测量重复性为4 nm,满足相关使用要求。
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| 关 键 词： | 波面数字化 移相干涉 液面基准 技术改造 |
Technical Reform of Wavefront Digitization of Ф300 mm Large-aperture Flat Equal Thickness Interferometer |
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| WANG Qing,GAO Zhishan,LI Zhixin,ZHANG Yongning,ZHAO Dongsheng,HU Zhong,HE Yue.Technical Reform of Wavefront Digitization of Ф300 mm Large-aperture Flat Equal Thickness Interferometer[J].Aviation Metrology & Measurement Technology,2011(5):12-14. |
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| Authors: | WANG Qing GAO Zhishan LI Zhixin ZHANG Yongning ZHAO Dongsheng HU Zhong HE Yue |
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| Institution: | 1.Nanjing Science-engineering University Electricity ＆ Optics College,Nanjing 210094,China; 2.The Department of Examination to Calculate,North Night-vision Sic.＆ Tech.Group Co.,Ltd.,Kunming 650114,China) |
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| Abstract: | The reform of a Ф300 mm large-aperture flat equal thickness interferometer to a phase-shifting digital plam interferenter is introduced.After reform the instrument adopt the liquid basis to calibrate systematic error.The maximum permissible error at Ф300 mm aperture is 76 nm（PV value）,and the repeatability of measurement is 4 nm,The related usage requests are satisfied. |
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| Keywords: | wavefront digitization phase-shifting interference liquid basis technical reform |
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