超光滑玻璃表面粗糙度测量结果研究

为分析测量仪器对测量结果的影响及结果差异的工艺原因,选取K9玻璃材料分两步在某抛光机上进行浮动抛光,用依据四种不同测量原理的表面形貌测量仪测量所加工的超光滑表面,对比各仪器测量结果,得出该试件表面实际所达到的精度;分析各仪器测量原理、分辨力决定因素,区分造成测量误差的原因及它们各自对粗糙度参数的影响,得到该超精密加工条件下,玻璃工件表面粗糙度测量仪器选择原则和注意事项.

Research on Ultra Smooth Roughness Result of Glass

The precision measurement of ultra smooth surface roughness is most important part of the precision manufacture. In order to study how does the topography apparatuses influence on the measurement result, the K9 glass material selected is polished in float polishing method. Using four different principle topography apparatuses, the ultra smooth surface of the workpiece is measured. Comparing to the different measurement results, the practical precision of the workpiece is got. By analyzing the principle of different topography apparatuses, decision factor of the resolving power, result of the error and the influence on the roughness measurement, the roughness measurement criterion and the principle of how to select the topography apparatus are got.