| 基于全息激光技术的纳米级分辨力位移传感器设计 |
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| 引用本文： | 焦小康,孙忠辉,朱振宇,万宇,王霁.基于全息激光技术的纳米级分辨力位移传感器设计[J].航空计测技术,2010,30(3):16-18. |
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| 作者姓名： | 焦小康 孙忠辉 朱振宇 万宇 王霁 |
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| 作者单位： | 焦小康,朱振宇,万宇,王霁(中航工业北京长城计量测试技术研究所,北京,100095);孙忠辉(第三十一实验训练基地,吉林,白城,137000) |
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| 摘 要： | 介绍了一种新型的基于全息激光技术的纳米位移传感器。全息激光技术最早广泛应用在CD,DVD等系统中,用以读取光盘信息,并对光盘进行寻迹、聚焦等。文中以采用全息激光技术的全息激光头为核心器件,结合少量光学元件,设计出一种纳米分辨力级位移传感器,并通过实验验证了设计结果。
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| 关 键 词： | 全息激光技术 位移传感器 纳米测量 |
Design of Displacement Sensor with Nanometer Resolution Based on Hologram-laser Technique |
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| JIAO Xiaokang,SUN Zhonghui,ZHU Zhenyu,WAN Yu,WANG Ji.Design of Displacement Sensor with Nanometer Resolution Based on Hologram-laser Technique[J].Aviation Metrology & Measurement Technology,2010,30(3):16-18. |
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| Authors: | JIAO Xiaokang SUN Zhonghui ZHU Zhenyu WAN Yu WANG Ji |
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| Institution: | 1.Changcheng Institute of Metrology ＆ Measurement,Beijing 100095,China;2.The Thirty-one Training Base,Baicheng 137000,China) |
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| Abstract: | A new sensor with nanometer resolution based on the hologram-laser technique is introduced.The hologram-laser technique is used in the system of CD and DVD to pick up information from the disk,track the disk and focus on the disk.Based on a hologram-pickup head witch adopts hologram-laser technique and a few optical elements,a sensor with nanometer resolution is designed,and some experiments are done to validate the design result. |
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| Keywords: | hologram-laser technique displacement-sensor nano-measurement |
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