球形表面粗糙度测量中两种干涉图像处理方法

讨论了用带有数字图像处理和计算系统的麦克尔逊干涉涉显微镜测量像人工关节这样的球形表面粗糙度的方法，用数字图像处理方法处理等倾干涉和等厚干扰这两种干扰图像，并萃取出反映被测球面微观不平度信息的干涉带的边界线。本文推导了用最小二乘拟合原理计算标准最小二乘圆和圆弧的算法以及用获取的被测表面的微面不平度偏差计算表面粗糙度参数的方法。

Optically Interferometric Roughness Measurements for the Spherical Surfaces Using Two Microscopic Interferograms

This paper discusses a method to carry out optical interferometric measurements for the surface roughness of spheres like a biomedical application to an artificial joint, using Michelson interferometric microscope with digital image processing and a computational system to process two interferograms. The paper proposes an algorithm on the calculation of the standard least squave circles and arc from each fringe edges and the meathods to obtain the profile departures from reference mean lines and the surface roughness parameters.