| EB-PVD法制备微层材料的研究 |
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| 引用本文： | 李晓海%陈贵清%韩杰才%孟松鹤.EB-PVD法制备微层材料的研究[J].宇航材料工艺,2005,35(6):13-16. |
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| 作者姓名： | 李晓海%陈贵清%韩杰才%孟松鹤 |
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| 作者单位： | 哈尔滨工业大学复合材料与结构研究所,哈尔滨,150001 |
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| 基金项目： | 国家自然科学基金（90205034） |
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| 摘 要： | 简要介绍了用于电子束物理气相沉积的设备及其发展，阐述了利用该技术制备微层材料的优点，同时对制备工艺和相应的材料性能作了详细的介绍，并指出使用电子束物理气相沉积技术制备微层材料具有广阔的发展前景。
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| 关 键 词： | 电子束物理气相沉积 微层材料 直接气相沉积 发展前景 |
| 收稿时间： | 2004-09-27 |
| 修稿时间： | 2004-09-272004-12-13 |
Research on Preparing Microlaminated Materials by Technology of EB - PVD |
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| Li Xiaohai,Chen Guiqing,Han Jiecai,Meng Songhe.Research on Preparing Microlaminated Materials by Technology of EB - PVD[J].Aerospace Materials & Technology,2005,35(6):13-16. |
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| Authors: | Li Xiaohai Chen Guiqing Han Jiecai Meng Songhe |
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| Institution: | Center for Composite Materials, Harbin Han Jiecai Meng Songhe Institute of Technology, harbin 150001 |
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| Abstract: | The facility used for electron beam physical vapor deposition(EB-PVD) and its development are briefly introduced.The advantages of preparing microlaminated materials by this technology are stated,and the preparation processes and the relevant material performances are introduced in detail.The broad development prospect of this preparation technology is indicated. |
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| Keywords: | EB - PVD Microlaminated materials Directed vapor deposition |
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