| 连续离子层吸附反应法制备超薄功能膜及应用 |
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| 引用本文： | 石亚平,高,燕,孙承月,吴宜勇.连续离子层吸附反应法制备超薄功能膜及应用[J].宇航材料工艺,2010,40(4). |
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| 作者姓名： | 石亚平 高 燕 孙承月 吴宜勇 |
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| 作者单位： | 哈尔滨工业大学材料科学与工程学院,哈尔滨 150080) |
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| 摘 要： | 阐述了液相法中制备超薄功能膜的新方法——连续离子层吸附反应法(Successive Ionic Layer Adsorption and Reaction,SILAR)。探究了它的薄膜生长机理、工艺参数影响以及应用现状,指出了尚需深入研究的问题。
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| 关 键 词： | 连续离子层吸附反应法 超薄 功能膜 工艺参数 |
SILAR Method for Preparation of Ultra Thin Functional Film and Its Application |
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| Shi Yaping,Gao Yan,Sun Chengyue,Wu Yiyong.SILAR Method for Preparation of Ultra Thin Functional Film and Its Application[J].Aerospace Materials & Technology,2010,40(4). |
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| Authors: | Shi Yaping Gao Yan Sun Chengyue Wu Yiyong |
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| Institution: | School of Materials Science and Engineering,Harbin Institute of Technology,Harbin 150080) |
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| Abstract: | A new technique called SILAR (Successive Ionic Layer Adsorption and Reaction) for the preparation
of ultra thin functional film and its development are introduced. The mechanism of the film nucleation and growth,the technics parameters effect,and the application situation are discussed and the main subjects to be deeply studied are poined out as well.
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| Keywords: | SILAR technique Ultra thin Functional film Technics parameters |
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