| MOCVD法制备高温抗氧化铱涂层研究进展 |
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| 引用本文： | 阎鑫%张秋禹.MOCVD法制备高温抗氧化铱涂层研究进展[J].宇航材料工艺,2003,33(2):1-3,9. |
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| 作者姓名： | 阎鑫%张秋禹 |
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| 作者单位： | 西北工业大学化学工程系,西安,710072 |
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| 基金项目： | 航空资助项目:00 G53 066 |
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| 摘 要： | 主要概述了用MOCVD法制备金属铱涂层的原理以及工艺参数对制备涂层的影响，并对铱做保护层的铱／铼喷管的寿命进行了预测。指出MOCVD法制备铱涂层的关键问题是沉积前驱体的选择、沉积工艺参数的优化，并对MOCVD法制备铱涂层的最新研究进展作了评述，指出了今后的研究发展方向。
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| 关 键 词： | MOCVD法 制备 抗氧化 铱涂层 抗高温氧化金属涂层 沉积工艺 参数优化 |
Recent Progress in Preparation of High Temperature Oxidation-resistant Iridium Coating by MOCVD |
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| Yan Xin Zhang Qiuyu.Recent Progress in Preparation of High Temperature Oxidation-resistant Iridium Coating by MOCVD[J].Aerospace Materials & Technology,2003,33(2):1-3,9. |
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| Authors: | Yan Xin Zhang Qiuyu |
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| Abstract: | The indium coating as high temperature oxidation-resistant materials are used widely in aeronautics, astronauts and marine fields. The principle and preparation of iridium coating by MOCVD have been reviewed and the factors affecting the quality of iridium coatings and the service time of iridium coated rhenium thruster have been introduced. The latest progress, current difficulties (selection of precursors, optimization of factors for MOCVD, etc.) and developing trend in these fields have also been described. |
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| Keywords: | MOCVD Rridium coating High-temperature Oxidation-resistant |
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