| 轴承钢等离子体基离子注碳复合改性层化学结构的研究 |
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| 引用本文： | 孙明仁.轴承钢等离子体基离子注碳复合改性层化学结构的研究[J].宇航材料工艺,1998,28(3):22-26. |
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| 作者姓名： | 孙明仁 |
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| 作者单位： | 哈尔滨工业大学!哈尔滨，150001(孙明仁，夏立芳，吴培莲，孙跃，马欣新)，哈尔滨理工大学!哈尔滨，150080(张振信，李光) |
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| 摘 要： | 通过激光Ｒａｍａｎ光谱、Ｘ射线光电子谱以及电阻和显微硬度的测试，研究了ＧＣｒ１５钢及镀钛ＧＣｒ１５钢试样经乙等离子基离子注入所得表面改性层的化学结构。
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| 关 键 词： | 离子注入 碳膜 复合改性层 化学结构 轴承钢 |
A Study on Chemical Structure of Compound Modified Layers by Plasma Based Ion Implantation with Carbon for Bearing Steel |
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| Sun Mingren, Xia Lifang ,Wu Peilian , Sun Yue, Ma Xinxin.A Study on Chemical Structure of Compound Modified Layers by Plasma Based Ion Implantation with Carbon for Bearing Steel[J].Aerospace Materials & Technology,1998,28(3):22-26. |
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| Authors: | Sun Mingren Xia Lifang Wu Peilian Sun Yue Ma Xinxin |
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| Institution: | Sun Mingren; Xia Lifang ;Wu Peilian ; Sun Yue; Ma Xinxin (Harbin Institute of Technology Research Harbin 15 0001 )Zhang Zhenxin;Li Guang (Harbin University of Science and Technology Harbin 150080 ) |
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| Abstract: | Steel GCr05 and steel GCr05 with deposited titanium layer were implanted with carbon by acetylene plasma based ion implantation. Chemical compositions of these implanted layers were investigated by X - ray photoelectronspectroscopy, Raman spectroscopy, surface electrical resistance and surface baldness. The results showed that the modified layers are compound modified layers which are the diamond - like carbon (DLC) deposited layer interfacial mixing layer and the DLC deposited layer C - Ti mixing layer respectively. Both mixing of C, Ti or C, Fe atoms andforming of TiC or carbide of iron in the C - Ti mixing layer or interfacial mixing layer were found. The hardness of theDLC layer is approximately 17 - 20 GPa corresponding to that of hard hydrogenated DLC films. |
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| Keywords: | Plasma based ion implantation DLC film Compound modified layer Chemical structure |
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