多光谱CVD硫化锌材料的磨削去除机理

为了探究红外光学材料多光谱CVD硫化锌的磨削加工去除机理,对抛光后的多光谱CVD硫化锌材料进行显微压痕和金刚石单颗粒刻划实验研究,并采用金刚石砂轮对材料进行磨削加工。实验研究表明,多光谱CVD硫化锌材料在机械去除过程中出现了弹性和塑性变形现象,萌生的裂纹和破碎主要沿晶界、刻划方向、磨削纹理方向扩展,小的压力可抑制裂纹的萌生和扩展,采用尖头金刚石颗粒可获得破碎和裂纹更少的表面,采用垂直磨削法,磨削后形成了自中心至外缘呈周期性、散射状的磨削纹理。本研究可为多光谱CVD硫化锌红外透镜的精密、超精密加工提供技术依据。

Grinding Removal Mechanism of Multispectral CVD Zinc Sulfide

To investigate the grinding removal mechanism of multispectral CVD zinc sulfide which is widely used in manufacturing infrared optical component, microscopic indentation and diamond single scratching experiment were carried out on polishing surface of zinc sulfide, and zinc sulfide was ground by diamond wheel. The elastic and plastic deformation were found in mechanical removal process of zinc sulfide. Crack and fracture were extended along the grain boundary, scratching direction, and grinding marks direction. And, crack initiation and propagation could be suppressed with lower press, lower crack and fracture would be obtained by cuspidal diamond abrasive. Besides, periodic and scattered grinding marks were found from center to edge by cross grinding. This work provides references and ideas for ultra-precision grinding aspheric lens of multi-spectral CVD zinc sulfide.