制作微结构的超声复合加工机理

提出了制作微结构的超声复合加工方法,分析了超声、超声复合电火花、超声复合电解微细加工机理。用微细放电组合工艺制作了多种截形微细工具电极;完善试验系统,进行了多种材料、形状微结构超声复合加工试验。结果表明:超声加工是制作硬脆材料微结构的有效方法;超声复合电火花制作金属材料微结构有较好的精度及加工稳定性;超声复合电解加工兼有效率高、精度好的技术优势。

Mechanism of Ultrasonic Combined Machining for Micro-Structures

The methods of ultrasonic combined machining micro-structures are described.The micro-machining mechanism and characteristics of ultrasonic combined machining were analyzed.Several kinds of cathodes with different sections were manufactured by combined electro-discharge micro-machining.The micro-machining system was built and improved.The micro-structures were manufactured by combined ultrasonic machining.It is proved that ultrasonic machining is an effective method for micro-structures of hard and brittle materials.Good precision and machining process stability can be obtained by ultrasonic combined electric-discharge machining micro-structures of hard and tough metal materials.Good precision and high productivity can be obtained by ultrasonic combined electrochemical machining.