| IBAD法沉积TiN薄膜的机械和耐腐性 |
| |
| 引用本文： | 李立,王娟.IBAD法沉积TiN薄膜的机械和耐腐性[J].中国民航学院学报,2005,23(2):42-46. |
| |
| 作者姓名： | 李立 王娟 |
| |
| 作者单位： | [1]中国民用航空学院理学院,天津300300 [2]中国民用航空学院基础实验中心,天津300300 |
| |
| 基金项目： | 天津市自然科学基金项目(033607911) |
| |
| 摘 要： | 用离子束辅助沉积(IBAD)方法在医用不锈钢317L基底上沉积TiN陶瓷薄膜。通过X射线衍射(XRD)和俄歇电子能谱(AES)分析研究了薄膜的微结构；测试了薄膜的耐磨性及薄膜与基底的附着力：运用电化学腐蚀的方法检测了薄膜在Hank’s模拟体液中的耐腐蚀性能。研究结果表明：用高、低能氮离子束兼用的IBAD方法沉积TiN多晶薄膜后，材料表面结构和性能发生明显改变。表面硬度和耐磨性有明显提高，在Hank’s模拟体液中显示出更强的抗腐蚀能力。
|
| 关 键 词： | 离子束辅助沉积（IBAD） 氮化钛（TiN） 机械性能 腐蚀 |
| 文章编号： | 1001-5000(2005)02-0042-05 |
| 修稿时间： | 2005年1月7日 |
Study on Mechanical Properties and Corrosion Resisitance of TiN Thin Flims by Duel Energy IBAD |
| |
| LI Li,WANG Juan.Study on Mechanical Properties and Corrosion Resisitance of TiN Thin Flims by Duel Energy IBAD[J].Journal of Civil Aviation University of China,2005,23(2):42-46. |
| |
| Authors: | LI Li WANG Juan |
| |
| Institution: | LI Li1,WANG Juan2 |
| |
| Abstract: | Titanium nitride ceramic thin films is deposited on 317L stainless steel(SS317L) substratum by ion beam assisted deposition (IBAD). Microstructures of thin films are characterized by X-ray Diffraction (XRD) and auger Electron spectroscopy (AES). The wear resistance and adhesion between the film and substratum are measured through nano indentation and scratch tester. The corrosion resistance was evaluated by the electrochemical corrosion experiments in Hank's simulated human plasma.The TiN films synthesized by both high and low energy IBAD show remarkable improvement in adhesion,wear resistance,corrosion resistance as well as in even higher corrosion resistance in Hank's simulated human plasma,all better than that of SS317L . |
| |
| Keywords: | IBAD Titanium Nitride(TiN) mechanical properties corrosion |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
