| 利用滚珠丝杠的微动特性实现纳米级定位 |
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| 引用本文： | 王波,董申,赵万生.利用滚珠丝杠的微动特性实现纳米级定位[J].航空精密制造技术,1998(6). |
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| 作者姓名： | 王波 董申 赵万生 |
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| 作者单位： | 哈尔滨工业大学机电学院 |
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| 摘 要： | 对用于超精密机床传动的滚珠丝杠的微动特性进行了实验研究，建立了它的数学模型，并在此基础上，进行了超精密位置伺服控制实验。实验结果表明，利用滚珠丝杠的微动特性可以实现纳米级定位
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| 关 键 词： | 超精密机床 伺服控制 微动特性 |
Micro Dynamics of Ball Screws for Nanometer Positioning |
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| Wang Bo,dong Shen,Zhao Wansheng.Micro Dynamics of Ball Screws for Nanometer Positioning[J].Aviation Precision Manufacturing Technology,1998(6). |
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| Authors: | Wang Bo dong Shen Zhao Wansheng |
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| Abstract: | In this paper, the micro dynamics of ball screws used in the drive of super-precision machine tools is studied. Its mathematical model is also set. Based on this, the servo control experiment of the super-precision positioning is done. Experiments identify that adopting micro dynamics of ball screws can make nanometer positioning into reality. |
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| Keywords: | super-precision machine tool servo control micro dynamics |
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