| 单晶硅超精密切削表面质量各向异性的研究 |
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| 引用本文： | 王明海,卢泽生.单晶硅超精密切削表面质量各向异性的研究[J].航空精密制造技术,2007,43(1):13-16. |
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| 作者姓名： | 王明海 卢泽生 |
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| 作者单位： | 1. 沈阳航空工业学院,沈阳,110034
2. 哈尔滨工业大学机电工程学院,哈尔滨,150001 |
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| 基金项目： | 国家科学技术预研资助项目(18.2.1.1) |
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| 摘 要： | 分析了单晶硅超精密切削时被加工晶面和滑移面间的相对关系以及单晶硅的力学特性,基于单晶硅超精密切削加工脆塑转变机理,模拟了分别以单晶硅(111)(、110)(、100)晶面为被加工面时的表面质量的各向异性特性。模拟结果表明这些晶面在不同晶向方向上表面质量呈现明显的各向异性特性,而以单晶硅(111)晶面作为被加工面时可以得到最好的加工表面质量。
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| 关 键 词： | 单晶硅 表面质量 各向异性 超精密切削 |
| 文章编号： | 1003-5451(2007)01-0013-04 |
| 修稿时间： | 2006年6月29日 |
Research on Orientation dependence of Surface Quality Involved in Ultra-Precision Turning of Single Crystal Silicon |
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| WANG Ming-hai,LU Ze-sheng.Research on Orientation dependence of Surface Quality Involved in Ultra-Precision Turning of Single Crystal Silicon[J].Aviation Precision Manufacturing Technology,2007,43(1):13-16. |
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| Authors: | WANG Ming-hai LU Ze-sheng |
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| Abstract: | The crystallographic relations of machined crystal plane and slip plane involved in ultra-precision turning and the mechanics characteristic of single crystal silicon are studied.Based on the brittle-ductile transition mechanism of ultra-precision turning of single crystal silicon,orientation dependence of surface quality of silicon which machined respectively along the(111),(110) and(100) crystal plane are investigated by using computer simulation and turning experiment.According to the simulation results,surface quality of all these machined crystal planes have obviously showed crystallographic orientation dependence and(111) crystal plane has best machinability than others. |
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| Keywords: | single crystal silicon surface quality orientation dependence ultra-precision turning |
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