| AFM针尖磨损机理研究进展 |
| |
| 引用本文： | 闫永达,尹大勇,费维栋,孙涛,董申.AFM针尖磨损机理研究进展[J].航空精密制造技术,2008,44(3). |
| |
| 作者姓名： | 闫永达 尹大勇 费维栋 孙涛 董申 |
| |
| 作者单位： | 1. 哈尔滨工业大学,哈尔滨,黑龙江,150001
2. 北京卫星环境工程研究所,北京,100094 |
| |
| 摘 要： | 在分析了原子力显微镜(AFM)探针在测量及加工领域应用过程中,探针磨损对于实验结果的影响的基础上,综述了Si3N4针尖、金刚石针尖和单晶硅针尖的磨损机理。并展望了探针磨损机理的发展趋势。
|
| 关 键 词： | 原子力显微镜(AFM) 针尖 磨损 |
Progress of study on AFM tip wear mechanism |
| |
| Yan Yong-da,Yin Da-yong,Fei Wei-dong,et al.Progress of study on AFM tip wear mechanism[J].Aviation Precision Manufacturing Technology,2008,44(3). |
| |
| Authors: | Yan Yong-da Yin Da-yong Fei Wei-dong |
| |
| Institution: | Yan Yong-da1,Yin Da-yong2,Fei Wei-dong1,et al |
| |
| Abstract: | Based on analysis of effects of worn AFM tip on the experimental results in the applications of measurement and fabrication by using Atomic Force Microscope(AFM), the wear mechanism of Si3N4 tip, diamond tip and silicon tip are summarized. Furthermore, prospect is also provided concerning future work in the study of AFM tip wear. |
| |
| Keywords: | Atomic Force Microscope(AFM) tip wear |
| 本文献已被 CNKI 万方数据 等数据库收录！ |
|
