| 空间谐振式MOEMS陀螺致动器研究 |
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| 引用本文： | 林恒,单志刚,王广龙,刘惠兰,冯丽爽.空间谐振式MOEMS陀螺致动器研究[J].航空精密制造技术,2007,43(5):10-13. |
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| 作者姓名： | 林恒 单志刚 王广龙 刘惠兰 冯丽爽 |
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| 作者单位： | 北京航空航天大学仪器科学与光电工程学院,北京,100083 |
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| 摘 要： | 研究并设计了一种新型的可应用于微光机电(MOEMS)陀螺的微位移及角度控制致动器。它包括高灵敏度压电陶瓷组件和控制电路,具有对微镜进行微米级位移和角秒级角度精确定位的功能。建立并完成了该致动器的结构模型和有限元仿真,提出了基于MOEMS技术的加工方法。
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| 关 键 词： | 致动器 精确定位 仿真 压电陶瓷 微光机电系统 陀螺 |
| 文章编号： | 1003-5451(2007)05-0010-04 |
| 修稿时间： | 2007年4月11日 |
Research on Actuator of Spatial Resonance MOEMS Gyroscope |
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| LIN Heng,SHAN Zhi-gang,WANG Guang-long,et al.Research on Actuator of Spatial Resonance MOEMS Gyroscope[J].Aviation Precision Manufacturing Technology,2007,43(5):10-13. |
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| Authors: | LIN Heng SHAN Zhi-gang WANG Guang-long |
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| Abstract: | An actuator of miniature displacement and small angle control is researched and designed, which can be used in micro optical electro-mechanical system (MOEMS) gyroscope. As a key device of the MOEMS gyro, this actuator, which is composed of high sensitive piezoelectric material and control circuit, has the precision position control ability to exactly adjust displacement of the micro-mirror which has micrometer scale, and angle which has arc-second level. Structure model of the actuator is set up, and finite element simulation is completed. Also, a fabrication method based on MOEMS technology has been put forward. |
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| Keywords: | actuator precision position control computer simulation piezoelectric material micro optical electro-mechanical system gyro |
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