| STM针尖-样品相互作用实验研究 |
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| 引用本文： | 张飞虎,张华丽,石美英.STM针尖-样品相互作用实验研究[J].航空精密制造技术,2007,43(4):5-8. |
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| 作者姓名： | 张飞虎 张华丽 石美英 |
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| 作者单位： | 哈尔滨工业大学精密工程研究所,哈尔滨,150001 |
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| 基金项目： | 国家自然科学基金资助项目(50375040) |
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| 摘 要： | 研究了大气状态下应用扫描隧道显微镜(STM)对金薄膜和单晶硅材料进行了纳米级电场加工实验。分析了针尖和样品表面的相互作用机理,以及隧道间隙、隧道电流反馈、脉冲个数等因素对纳米点结构的加工产生的影响,并探讨了针尖磨损对纳米结构一致性的影响。
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| 关 键 词： | 纳米加工 STM 隧道间隙 磨损 |
| 文章编号： | 1003-5451(2007)04-0005-04 |
| 修稿时间： | 2007年3月1日 |
Experimental Studies of the Interaction Mechanism between the Tip and Sample Using STM |
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| ZHANG Fei-hu,ZHANG Hua-li,SHI Mei-ying.Experimental Studies of the Interaction Mechanism between the Tip and Sample Using STM[J].Aviation Precision Manufacturing Technology,2007,43(4):5-8. |
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| Authors: | ZHANG Fei-hu ZHANG Hua-li SHI Mei-ying |
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| Abstract: | The nano dots fabrication tests of Au film and single-crystal silicon were performed in air using scanning tunneling microscope(STM).The interaction mechanism between the tip and sample were investigated,and the influence of tunneling tap,tunneling current feed-back and pulse amount on the nano-fabrication process were studied.How the tip wear works on the nano dots' consistency during the process was discussed. |
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| Keywords: | nano-fabrication scanning tunneling microscope tunneling gap wear |
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