| 磁过滤直流真空阴极弧制备类金刚石膜的结构和力学性能研究 |
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| 引用本文： | 祝土富,沈丽如,徐桂东,金凡亚.磁过滤直流真空阴极弧制备类金刚石膜的结构和力学性能研究[J].航空精密制造技术,2008,44(5). |
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| 作者姓名： | 祝土富 沈丽如 徐桂东 金凡亚 |
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| 作者单位： | 核工业西南物理研究院,成都,610041 |
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| 摘 要： | 采用磁过滤直流真空阴极弧沉积技术在硅片、不锈钢片基体上制备了类金刚石(DLC)膜。检测结果表明,膜中存在着微米级的大颗粒分布,膜厚为290nm,sp3键的含量为62.23%。所制备的薄膜具有典型的DLC膜Raman光谱特征,耐磨性能优良,膜与基体的结合性能良好。
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| 关 键 词： | 磁过滤真空阴极弧 DLC膜 Raman XPS 显微硬度计 摩擦磨损仪 洛氏硬度计 |
Micro-structure and Mechanical Properties of Diamond-like Carbon Film Deposited by DC Filtered Cathodic Vacuum Arc Technology |
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| ZHU Tu-fu SHEN Li-ru XU Gui-dong.Micro-structure and Mechanical Properties of Diamond-like Carbon Film Deposited by DC Filtered Cathodic Vacuum Arc Technology[J].Aviation Precision Manufacturing Technology,2008,44(5). |
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| Authors: | ZHU Tu-fu SHEN Li-ru XU Gui-dong |
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| Abstract: | Diamond-like carbon (DLC) films were deposited on monoervstalline silicon wafer and stainless steel plate by DC filtered cathodic,vacuum are technology.The result showed that there are large particles with magnitude of microns existed in all films.The thickness of the film deposited on stainless steel plate is 290nm,the content of sp3 bonding carbon atoms is 62.23% in the film deposited on the monocrystalline silicon wafer.The film exhibits excellent wear resistance and the adhesion to substrate is fine. |
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| Keywords: | filtered cathodic vacuum arc diamond-like carbon films Raman X-ray photoelectron spectroscopy ball-on-disk tribometer rockwell apparatus |
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