| 超光滑表面杂质微粒的识别与统计技术 |
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| 引用本文： | 徐传义,史兴宽,麻丽红.超光滑表面杂质微粒的识别与统计技术[J].航空精密制造技术,2002,38(3):6-10. |
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| 作者姓名： | 徐传义 史兴宽 麻丽红 |
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| 作者单位： | 1. 西北工业大学,西安,710072
2. 航天科工集团第三研究院31所,北京,100074 |
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| 摘 要： | 从理论上分析了微粒重叠对测量结果的影响,通过简化模型,给出了对粒子数测量结果的补偿曲线。并建立了分析图象分辨率、微粒识别率和识别阈值三者关系的模型,给出了在识别阈值不变情况下,图象分辨率与微粒识别率的关系图,从而可以选择优化的图象分辨率和微粒识别阈值。
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| 关 键 词： | 微粒测量 微粒重叠 识别阈值 超光滑表面 |
| 文章编号： | 1003-5451(2002)03-06-04 |
| 修稿时间： | 2001年12月17 |
Study on Detecting and Quantifying Contaminating Particles on Super-Smooth Surface |
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| Xu Chuanyi,Shi Xingkuan,Ma Lihong.Study on Detecting and Quantifying Contaminating Particles on Super-Smooth Surface[J].Aviation Precision Manufacturing Technology,2002,38(3):6-10. |
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| Authors: | Xu Chuanyi Shi Xingkuan Ma Lihong |
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| Institution: | Xu Chuanyi1,Shi Xingkuan1,Ma Lihong2 |
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| Abstract: | By theoretical analysis,the influence particles overlap on measuring r esult is analyzed.The com-pensation curve to the result of particle count measured is given by using a simplified model.The model of the relations among image resolvability,particles detecting efficiency a nd detecting threshold is set up.The relative figure between image resolvability and particles detecting efficiency in constant detecting threshold is p resented,so optimized image resolvability and d etecting threshold could be selecte d. |
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| Keywords: | particles measurement particles o verlap detecting threshold super-smooth surface |
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