类芬顿反应在碳化硅光学材料研抛中的作用

本文讨论了以零价铁代替亚铁盐形成类芬顿反应(Fenton-Kind process)体系应用于碳化硅光学材料抛光过程中的反应机理,通过双转子研抛机床对SiC光学材料进行了研抛实验,验证了类芬顿反应能够有效地提高SiC材料的加工效率和加工质量。通过对比不同磨料粒度研抛液加工结果,获得了SiC材料研抛过程中化学与机械作用规律。

Effect of Fenton-Kind process in Silicon Carbon polishing

The zero-valent iron is instead of ferrous salts in the Fenton-Kind process,and the mechanism is discussed between the Fenton-Kind process and the polishing of the SiC optical material.Using dual rotator polishing machine tool to polish the SiC optical material,it proves that the polishing efficiency and the smooth of the SiC surface become better by Fenton-Kind process.The polishing principle between chemistry and machine is proved by comparing the polishing use different diameter abrasive powders.