| 超光滑表面清洗技术发展研究 |
| |
| 引用本文： | 张晋宽,滕霖,王宇.超光滑表面清洗技术发展研究[J].航空精密制造技术,2007,43(2):11-14. |
| |
| 作者姓名： | 张晋宽 滕霖 王宇 |
| |
| 作者单位： | 中国一航飞行自动控制研究所,西安,710065 |
| |
| 基金项目： | 国防“十一五”装备预先研究项目(513180201) |
| |
| 摘 要： | 介绍了超光滑表面清洗的基本理论,指出了当前超光滑表面清洗中存在的问题,系统分析了现有清洗技术的原理和清洗效果,并指出清洗技术的发展趋势。
|
| 关 键 词： | 清洗技术 超光滑表面 湿法清洗 干法清洗 |
| 文章编号： | 1003-5451(2007)02-0011-04 |
| 修稿时间： | 2006年10月19 |
Study of Development for Cleaning Technology of Super Smooth Surface |
| |
| ZHANG Jin-kuan,TENG Lin,WANG Yu.Study of Development for Cleaning Technology of Super Smooth Surface[J].Aviation Precision Manufacturing Technology,2007,43(2):11-14. |
| |
| Authors: | ZHANG Jin-kuan TENG Lin WANG Yu |
| |
| Abstract: | With the constant improvement of quality request about smooth surface, cleaning technology has become important technology in super smooth surface manufacture. It is introduced the elementary theory of super smooth surface cleaning, pointed out the problems existing in current cleaning process, systematically analyzed the principle and the effect of the current cleaning technology, and summarized the development trend of cleaning technology, which will provide the reference for choosing appropriate cleaning technology. |
| |
| Keywords: | cleaning technology super smooth surface wet cleaning dry cleaning |
| 本文献已被 CNKI 万方数据 等数据库收录！ |
|
