| 大气等离子加工系统设计及实验验证 |
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| 引用本文： | 赵培君,王波,卢礼华,董申.大气等离子加工系统设计及实验验证[J].航空精密制造技术,2010,46(1). |
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| 作者姓名： | 赵培君 王波 卢礼华 董申 |
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| 作者单位： | 哈尔滨工业大学机电工程学院,哈尔滨,150001 |
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| 摘 要： | 建立了面向复杂光学表面的大气等离子抛光系统,并用该系统进行硅片表面加工的实验研究.研究了CF_4、SF_6两种气体的放电特性以及加工效果,得到了加工速率与功率,流量间的关系,并通过原子力显微镜观察了加工后的表面质量.
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| 关 键 词： | 复杂光学表面 大气等离子体 抛光 |
Design and Experimentation of Atmospheric Pressure Plasma Polishing System |
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| Abstract: | The atmospheric pressure polishing system of complex optical surface was established.The experimental study on machining of silicon wafer surface was made by using this system.The discharge characteristics and machining effect of CF4 and SF6 were researched.The relationship between machining rate and power & flow was gotten by experiment.The quality of machined surface was observed by atomic force microscope(AFM). |
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| Keywords: | complex optical surface atmospheric pressure plasma polishing |
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