| 超精密加工中研抛分布力测量方法的探讨 |
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| 引用本文： | 史兴宽.超精密加工中研抛分布力测量方法的探讨[J].航空精密制造技术,1998(4). |
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| 作者姓名： | 史兴宽 |
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| 作者单位： | 西北工业大学飞行器制造工程系 |
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| 摘 要： | 在研磨盘的不同位置打深盲孔，近于贯穿，仅留下薄薄一圆形平膜片，作为抛光法向压力的敏感元件。此圆平膜片半径，厚度由位移敏感元件灵敏度及抛光所容许的外扰（对实际工作状态影响足够小）决定。在此孔中安置光纤位移传感器测量圆平膜片的变形位移，就可解算出抛光时研磨盘的局部压力。信号调制后通过多路遥测装置或电刷滑环等集流器将信号引出。
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| 关 键 词： | 圆平膜片 光纤位移传感器 研磨抛光 分布力 |
A Discussion on the Measurement of Distributed Forces in Super-precision Lapping and Polishing * |
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| Tong Meng,Shi Xingkuan.A Discussion on the Measurement of Distributed Forces in Super-precision Lapping and Polishing *[J].Aviation Precision Manufacturing Technology,1998(4). |
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| Authors: | Tong Meng Shi Xingkuan |
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| Abstract: | In this paper,measurements of distributed forces in super-precision lapping and polishing with reflection type on fibre-optical displacement transducer are discussed The distribution of transverse load on the lap is too insignificant to be measured without significant distortion of real lapping or polishing condition To solve this problem,we assume that transverse load is uniformly distributed in any small area And then sensitive reflection type fibre-optical displacement transducer and round flat diaphragm,similar to which are used in hydraulic pressure measurement,can be applied to measure the intensity of transverse component of surface force on the diaphragm Some related problems are also discussed |
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| Keywords: | round flat diaphragm fibre-optical displacement transducer lapping and polishing distributed forces |
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