| 蓝宝石衬底的超光滑表面加工进展 |
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| 引用本文： | 周兆忠,袁巨龙,文东辉.蓝宝石衬底的超光滑表面加工进展[J].航空精密制造技术,2009,45(3). |
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| 作者姓名： | 周兆忠 袁巨龙 文东辉 |
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| 作者单位： | 1. 浙江工业大学浙西分校,衢州,324000;浙江工业大学超精密加工研究中心,杭州,310014
2. 浙江工业大学超精密加工研究中心,杭州,310014 |
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| 基金项目： | 国家自然科学基金重点项目，浙江省自然科学基金 |
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| 摘 要： | 回顾了(0001)面蓝宝石衬底在LED的重要作用及其磨粒加工方法的发展进程.归纳了磨粒加工在蓝宝石衬底的超光滑制备过程中的应用现状,分别对磨削、机械抛光、干式机械化学抛光、湿式机械化学和化学机械抛光在蓝宝石衬底中的应用进行了总结和分析,对比了不同方法对蓝宝石衬底的加工损伤特性和优缺点.
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| 关 键 词： | 蓝宝石衬底 超光滑表面 固态照明 发光二极体 |
Survey on the Progress of Ultra-smooth Sapphire Wafer Surface |
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| ZHOU Zhao-zhong,YUAN Ju-long,WEN Dong-hui.Survey on the Progress of Ultra-smooth Sapphire Wafer Surface[J].Aviation Precision Manufacturing Technology,2009,45(3). |
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| Authors: | ZHOU Zhao-zhong YUAN Ju-long WEN Dong-hui |
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| Institution: | 1.West Branch of Zhejiang University of Technology;Quzhou 324000 2.Precision Engineering Laboratory;Zhejiang University of Technology;Hangzhou 310014 |
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| Abstract: | This paper review the status,technology and progress of sapphire wafer for blue LED.The applications status of sapphire wafer in ultra-smooth process were presented.The applications on sapphire wafer by grinding,mechanical polishing,dry mechanochemical polishing,wet mechanochemical polishing and chemical mechanical polishing were analyzed.Comparison on damage characteristics,strongpoints and defects of machining sapphire wafer by different methods were made. |
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| Keywords: | sapphire wafer ultra-smooth surface solid state lighting light emitting diode |
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